Silicon Nitride Alpha Formula: Si3N4 (alpha) Low Loss

Submitted by Sylvie Schamm, April 20, 2005.

Source / Purity: CVD

Author Comments: Dispersion not 0.09 eV/ch but 0.1 eV/ch Analyst: S.Schamm. Temperature: Room.

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Spectrum Metadata

Specimen Name
CM30
Spectrum Type
Low Loss
Specimen Formula
Si3N4 (alpha)
Data Range
-12.7 eV - 89.17 eV
Source and Purity
CVD
Keywords
imported from old site
Alternative URL
Old EELS DB
Microscope Name / Model
CM30
Gun Type
LaB6
Incident Beam Energy
100 kV
Resolution
1.1 eV
Dispersion
0.1 eV/pixel
Acquisition Mode
Diffraction
Convergence Semi-angle
8.4 mrad
Collection Semi-angle
0.65 mrad
Probe Size
80 nm2
Beam Current
1.6
Integration Time
0.045 secs
Number of Readouts
50
Detector
Parallel: 666 Gatan
Dark Current Correction
Yes
Gain Variation Spectrum
Yes
Relative Thickness
0.4 t/λ